Invention Grant
US09305951B2 Pixel structure of CMOS image sensor and manufacturing method thereof
有权
CMOS图像传感器的像素结构及其制造方法
- Patent Title: Pixel structure of CMOS image sensor and manufacturing method thereof
- Patent Title (中): CMOS图像传感器的像素结构及其制造方法
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Application No.: US14439229Application Date: 2012-12-28
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Publication No.: US09305951B2Publication Date: 2016-04-05
- Inventor: Xiaoxu Kang , Yuhang Zhao
- Applicant: Xiaoxu Kang , Yuhang Zhao
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI IC R&D CENTER CO., LTD
- Current Assignee: SHANGHAI IC R&D CENTER CO., LTD
- Current Assignee Address: CN Shanghai
- Priority: CN201210575311 20121226
- International Application: PCT/CN2012/087826 WO 20121228
- International Announcement: WO2014/101097 WO 20140703
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A pixel structure of a CMOS image sensor pixel structure and a manufacturing method thereof. The structure comprises a photosensitive element (37) and a multi-layer structure of a standard CMOS device arranged on the silicon substrate (31). A deep groove (38) having a light-transmitting space therein is formed above the photosensitive element, a side wall of the deep groove is surrounded by a light reflection shielding layer (39) continuously arranged in a longitudinal direction to reflect the light incident on the light reflection shielding layer. The side wall of the deep groove is surrounded by metal interconnects, vias, contact holes and polysilicon in annular configurations, thus the incident light on the deep grove is substantially completely reflected, which avoids the optical crosstalk and effectively improves the optical resolution and sensitivity of the pixel and the performance and reliability of the chip.
Public/Granted literature
- US20150295002A1 PIXEL STRUCTURE OF CMOS IMAGE SENSOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2015-10-15
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