Invention Grant
US09305961B2 Wafer-level packaging method of BSI image sensors having different cutting processes
有权
具有不同切割过程的BSI图像传感器的晶圆级封装方法
- Patent Title: Wafer-level packaging method of BSI image sensors having different cutting processes
- Patent Title (中): 具有不同切割过程的BSI图像传感器的晶圆级封装方法
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Application No.: US14150307Application Date: 2014-01-08
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Publication No.: US09305961B2Publication Date: 2016-04-05
- Inventor: Zhi-Qi Wang , Qiong Yu , Wei Wang
- Applicant: China Wafer Level CSP Co., Ltd.
- Applicant Address: CN Suzhou
- Assignee: China Wafer Level CSP Co., Ltd.
- Current Assignee: China Wafer Level CSP Co., Ltd.
- Current Assignee Address: CN Suzhou
- Agency: Seed IP Law Group PLLC
- Priority: CN201310007440 20130109
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L27/146

Abstract:
A wafer-level packaging method of BSI image sensors includes the following steps: S1: providing a wafer package body comprising a silicon base, an interconnect layer, a hollow wall and a substrate; S2: cutting the wafer package body via a first blade in a first cutting process to separate the interconnect layer of adjacent BSI image sensors; and S3: cutting the wafer package body via a second blade in a second cutting process to obtain independent BSI image sensors. As a result, damage of the interconnect layer and the substrate may be decreased to improve performance and reliability of the BSI image sensor.
Public/Granted literature
- US20140191352A1 WAFER-LEVEL PACKAGING METHOD OF BSI IMAGE SENSORS HAVING DIFFERENT CUTTING PROCESSES Public/Granted day:2014-07-10
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