Invention Grant
- Patent Title: Magnetic random access memory and method of manufacturing the same
- Patent Title (中): 磁性随机存取存储器及其制造方法
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Application No.: US14200838Application Date: 2014-03-07
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Publication No.: US09305972B2Publication Date: 2016-04-05
- Inventor: Keisuke Nakatsuka
- Applicant: Keisuke Nakatsuka
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/12

Abstract:
According to one embodiment, a memory includes a semiconductor layer including a trench which extends in a first direction, the trench having a first portion with a first depth and a second portion with a second depth deeper than the first depth, a gate insulating layer covering the semiconductor layer in the first portion, an element isolation layer covering the semiconductor layer in the second portion, the element isolation layer extending in a second direction from the second portion, a gate electrode provided on the gate insulating layer in the first portion and the element isolation layer in the second portion, the gate electrode filling the trench, and a third impurity region provided in the semiconductor layer directly below the second portion, the third impurity region being continuous in the first direction.
Public/Granted literature
- US20150129945A1 MAGNETIC RANDOM ACCESS MEMORY AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2015-05-14
Information query
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