Invention Grant
- Patent Title: Curable composition and method of forming pattern
- Patent Title (中): 可固化组合物和形成图案的方法
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Application No.: US13682464Application Date: 2012-11-20
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Publication No.: US09308552B2Publication Date: 2016-04-12
- Inventor: Kenichi Iida , Toshiki Ito
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A. Inc., IP Division
- Priority: JP2011-259271 20111128
- Main IPC: B82Y10/00
- IPC: B82Y10/00 ; B05D5/00 ; G03F7/00 ; B82Y40/00
Abstract:
A curable composition that can be released from a mold simply within a short period of time after photo-curing by a small mold-releasing force is provided. The curable composition contains a gas-generating agent that generates a gas by pressure application. A method of forming a pattern is also provided. In the method, the mold can be released with a small force.
Public/Granted literature
- US20130136901A1 CURABLE COMPOSITION AND METHOD OF FORMING PATTERN Public/Granted day:2013-05-30
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