Invention Grant
US09308618B2 Linear prediction for filtering of data during in-situ monitoring of polishing 有权
在抛光原位监测期间过滤数据的线性预测

Linear prediction for filtering of data during in-situ monitoring of polishing
Abstract:
A method of controlling polishing includes polishing a substrate, during polishing monitoring the substrate with an in-situ monitoring system, the monitoring including generating a signal from a sensor, and filtering the signal to generate a filtered signal. The signal includes a sequence of measured values, and the filtered signal including a sequence of adjusted values. The filtering includes for each adjusted value in the sequence of adjusted values, generating at least one predicted value from the sequence of measured values using linear prediction, and calculating the adjusted value from the sequence of measured values and the predicted value. At least one of a polishing endpoint or an adjustment for a polishing rate is determined from the filtered signal.
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