Invention Grant
- Patent Title: Linear prediction for filtering of data during in-situ monitoring of polishing
- Patent Title (中): 在抛光原位监测期间过滤数据的线性预测
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Application No.: US13456801Application Date: 2012-04-26
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Publication No.: US09308618B2Publication Date: 2016-04-12
- Inventor: Dominic J. Benvegnu
- Applicant: Dominic J. Benvegnu
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/00
- IPC: B24B37/00 ; B24B37/013 ; B24B49/10

Abstract:
A method of controlling polishing includes polishing a substrate, during polishing monitoring the substrate with an in-situ monitoring system, the monitoring including generating a signal from a sensor, and filtering the signal to generate a filtered signal. The signal includes a sequence of measured values, and the filtered signal including a sequence of adjusted values. The filtering includes for each adjusted value in the sequence of adjusted values, generating at least one predicted value from the sequence of measured values using linear prediction, and calculating the adjusted value from the sequence of measured values and the predicted value. At least one of a polishing endpoint or an adjustment for a polishing rate is determined from the filtered signal.
Public/Granted literature
- US20130288572A1 Linear Prediction For Filtering Of Data During In-Situ Monitoring Of Polishing Public/Granted day:2013-10-31
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