Invention Grant
- Patent Title: Micromechanical system and corresponding manufacturing method
- Patent Title (中): 微机械系统及相应的制造方法
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Application No.: US13434486Application Date: 2012-03-29
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Publication No.: US09309107B2Publication Date: 2016-04-12
- Inventor: Jochen Reinmuth , Andreas Scheurle , Christian Bierhoff
- Applicant: Jochen Reinmuth , Andreas Scheurle , Christian Bierhoff
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102011006403 20110330
- Main IPC: B32B7/14
- IPC: B32B7/14 ; B81C1/00 ; G01P15/08

Abstract:
A micromechanical system is described having a substrate; a first micromechanical functional area, which is situated above the substrate; a second micromechanical functional area, which is situated above the first micromechanical functional area and is connected via a first weblike anchoring structure to the first micromechanical functional area; a third micromechanical functional area, which is situated above the second micromechanical functional area, and which has a first subarea and a second subarea; the first subarea being connected via a second weblike anchoring structure to the second micromechanical functional area; and the second subarea being mounted floating over the substrate by the first subarea. The invention also provides a method for manufacturing such a micromechanical system.
Public/Granted literature
- US20120251799A1 Micromechanical system and corresponding manufacturing method Public/Granted day:2012-10-04
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