Invention Grant
US09309413B2 Multi-component thermal spray coating material and production method and coating method thereof 有权
多组分热喷涂料及其制备方法及其涂布方法

Multi-component thermal spray coating material and production method and coating method thereof
Abstract:
Disclosed are a thermal spray coating material which greatly improves corrosion resistance, as compared to conventional Al2O3 and Y2O3 crystalline coatings and Al—Y—O and Al—Zr—O amorphous thermal spray coatings, a production method of the coating material, and a coating method using the same. The thermal spray coating material has a chemical formula of Y2xZr1−xOx+2, where x ranges from 0.19 to 0.83, preferably from 0.35 to 0.69. Accordingly, it is possible to produce a coating material for use in a chamber of vacuum plasmas equipment or internal parts of the chamber can be produced, which improves the corrosion resistance of a protective coating film upon ceramic thermal spray coating and lengthens the lifespan of parts.
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