Invention Grant
- Patent Title: Single chip scanning lidar and method of producing the same
- Patent Title (中): 单片扫描激光雷达及其制作方法
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Application No.: US14317695Application Date: 2014-06-27
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Publication No.: US09310471B2Publication Date: 2016-04-12
- Inventor: Keyvan Sayyah , Pamela R. Patterson , Oleg M. Efimov
- Applicant: HRL LABORATORIES LLC
- Applicant Address: US CA Malibu
- Assignee: HRL Laboratories, LLC
- Current Assignee: HRL Laboratories, LLC
- Current Assignee Address: US CA Malibu
- Agency: Ladas & Parry
- Main IPC: G01C3/08
- IPC: G01C3/08 ; G01S7/481 ; H01S5/026 ; H01S5/02 ; H01S5/12 ; G01S17/02

Abstract:
A chip-scale scanning lidar includes a two dimensional (2D) scanning micromirror for a transmit beam and a 2D scanning micromirror for a receive beam, a laser diode and a photodetector, a first waveguide and first grating outcoupler coupled to a front facet of the laser diode, a second waveguide and a second grating outcoupler coupled to a rear facet of the laser diode on a substrate. A first fixed micromirror, a second micromirror, a third micromirror, and a focusing component are in a dielectric layer bonded to the substrate over the laser diode and photodetector. The photodetector is optically coupled to the second fixed micromirror and the third fixed micromirror for coherent detection.
Public/Granted literature
- US20150378012A1 SINGLE CHIP SCANNING LIDAR AND METHOD OF PRODUCING THE SAME Public/Granted day:2015-12-31
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