Invention Grant
US09310607B2 Actuator, manufacturing method of actuator, light scanner and image forming apparatus
有权
致动器,致动器的制造方法,光扫描器和成像装置
- Patent Title: Actuator, manufacturing method of actuator, light scanner and image forming apparatus
- Patent Title (中): 致动器,致动器的制造方法,光扫描器和成像装置
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Application No.: US13231192Application Date: 2011-09-13
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Publication No.: US09310607B2Publication Date: 2016-04-12
- Inventor: Makiko Hino , Yasushi Mizoguchi
- Applicant: Makiko Hino , Yasushi Mizoguchi
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2010-256243 20101116
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
An actuator includes a light reflection part having light reflectivity, a movable part having the light reflection part and being rotatable around a rotation center axis, a pair of connection parts connected to the movable part, and a support part that supports the pair of connection parts, and each of the connection parts includes a pair of beam members, a distance between the pair of beam members gradually increases from a first surface side toward a second surface side of the movable part when seen from a direction in parallel to the rotation center axis of the movable part, and given that a distance between ends at the first surface side of the pair of beam members is W1 and a thickness of the pair of beam members in a thickness direction of the movable part is t, the following expression (1) is satisfied. w 1
Public/Granted literature
- US20120120458A1 ACTUATOR, MANUFACTURING METHOD OF ACTUATOR, LIGHT SCANNER AND IMAGE FORMING APPARATUS Public/Granted day:2012-05-17
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