Invention Grant
- Patent Title: Negative resist composition and patterning process using same
- Patent Title (中): 负光刻胶组合物和使用其的图案化工艺
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Application No.: US14564764Application Date: 2014-12-09
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Publication No.: US09310681B2Publication Date: 2016-04-12
- Inventor: Jun Hatakeyama , Hiroyuki Urano , Masashi Iio
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-003194 20140110
- Main IPC: G03F7/038
- IPC: G03F7/038 ; G03F7/30 ; G03F7/40 ; H01L21/027 ; C08G8/28

Abstract:
A negative resist composition containing as base resin a novolak resin having repeating unit “a”, wherein R1 represents a hydrogen atom, a hydroxy group, or any of a linear, a branched, or a cyclic alkyl group, alkoxy group, acyl group, acyloxy group, and alkoxy carbonyl group, these groups having 1 to 6 carbon atoms; and R2 represents a hydrogen atom, any of a linear, a branched, or cyclic alkyl group having 1 to 6 carbon atoms, alkenyl group having 2 to 10 carbon atoms, aryl group having 6 to 10 carbon atoms, which may contain a hydroxy group, an alkoxy group, an ether group, a thioether group, a carboxyl group, an alkoxy carbonyl group, and an acyloxy group. “A” is within the range of 0
Public/Granted literature
- US20150198883A1 NEGATIVE RESIST COMPOSITION AND PATTERNING PROCESS USING SAME Public/Granted day:2015-07-16
Information query
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