Invention Grant
- Patent Title: Coil antenna with plural radial lobes
- Patent Title (中): 具有多个径向叶片的线圈天线
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Application No.: US14107137Application Date: 2013-12-16
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Publication No.: US09312104B2Publication Date: 2016-04-12
- Inventor: Vladimir Knyazik , Samer Banna , Kyle R. Tantiwong
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agent Robert M. Wallace
- Main IPC: H01Q1/26
- IPC: H01Q1/26 ; H01J37/32
Abstract:
A low inductance coil antenna for a plasma reactor has plural conductor lobes extending radially from respective RF supply connections.
Public/Granted literature
- US20150097478A1 COIL ANTENNA WITH PLURAL RADIAL LOBES Public/Granted day:2015-04-09
Information query
