Invention Grant
- Patent Title: Method of forming high-density arrays of nanostructures
- Patent Title (中): 形成高密度纳米结构阵列的方法
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Application No.: US14701213Application Date: 2015-04-30
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Publication No.: US09312132B2Publication Date: 2016-04-12
- Inventor: Christos D. Dimitrakopoulos , Jeehwan Kim , Hongsik Park , Byungha Shin
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Louis J. Percello
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/02 ; H01L21/304

Abstract:
A method for forming nanostructures includes bonding a flexible substrate to a crystalline semiconductor layer having a two-dimensional material formed on a side opposite the flexible substrate. The crystalline semiconductor layer is stressed in a first direction to initiate first cracks in the crystalline semiconductor layer. The first cracks are propagated through the crystalline semiconductor layer and through the two-dimensional material. The stress of the crystalline semiconductor layer is released to provide parallel structures including the two-dimensional material on the crystalline semiconductor layer.
Public/Granted literature
- US20150235849A1 SELF-FORMATION OF HIGH-DENSITY ARRAYS OF NANOSTRUCTURES Public/Granted day:2015-08-20
Information query
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