Invention Grant
- Patent Title: Dual damascene structure with liner
- Patent Title (中): 双镶嵌结构与衬垫
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Application No.: US13732825Application Date: 2013-01-02
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Publication No.: US09312203B2Publication Date: 2016-04-12
- Inventor: Baozhen Li , Chih-Chao Yang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L23/48 ; H01L21/768 ; H01L23/482 ; H01L23/532

Abstract:
A dual damascene structure with an embedded liner and methods of manufacture are disclosed. The method includes forming a dual damascene structure in a substrate. The method further includes reflowing a seed layer such that material of the seed layer flows into a via of the dual damascene structure. The method further includes forming a liner material on the material over or within the via of the dual damascene structure. The method further includes filling any remaining portions of the via and a trench of the dual damascene structure with additional material.
Public/Granted literature
- US20140183739A1 DUAL DAMASCENE STRUCTURE WITH LINER Public/Granted day:2014-07-03
Information query
IPC分类: