Invention Grant
- Patent Title: Method for fabricating a carbon nanotube interconnection structure
- Patent Title (中): 制造碳纳米管互连结构的方法
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Application No.: US14125313Application Date: 2011-12-31
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Publication No.: US09312223B2Publication Date: 2016-04-12
- Inventor: Yuhang Zhao , Xiaoxu Kang
- Applicant: Yuhang Zhao , Xiaoxu Kang
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI IC R&D CENTER CO., LTD
- Current Assignee: SHANGHAI IC R&D CENTER CO., LTD
- Current Assignee Address: CN Shanghai
- Priority: CN201110401441 20111206
- International Application: PCT/CN2011/085150 WO 20111231
- International Announcement: WO2013/082844 WO 20130613
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L21/768 ; H01L21/285 ; H01L23/522

Abstract:
The present invention relates to an interconnection structure and a method for fabricating the same. According to the present invention, cavities are formed between the interconnection dielectric by using a sacrificial layer, carbon nanotubes are used as the interconnection material for local interconnection between via holes, graphene nanoribbons are used as the interconnection material for metal lines, and cavities are included in the interconnection dielectric. In addition, the conventional CMOS BEOL Cu interconnection technique is applied to the intermediate interconnection level and the global interconnection level. In this way, the high parasitic resistance and parasitic capacitance in the Cu interconnection technique, which may occur when the local interconnection is relatively small in size, can be effectively overcome.
Public/Granted literature
- US20140138829A1 INTERCONNECTION STRUCTURE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2014-05-22
Information query
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