Invention Grant
- Patent Title: Static random access memory cell and forming method thereof
- Patent Title (中): 静态随机存取存储单元及其形成方法
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Application No.: US14580967Application Date: 2014-12-23
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Publication No.: US09312263B2Publication Date: 2016-04-12
- Inventor: Jian Hu
- Applicant: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Applicant Address: CN Shanghai
- Assignee: Shanghai Huadong Grace Semiconductor Manufacturing Corporation
- Current Assignee: Shanghai Huadong Grace Semiconductor Manufacturing Corporation
- Current Assignee Address: CN Shanghai
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: CN201410005710 20140107
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L21/8244 ; H01L21/02 ; H01L29/78 ; G11C11/412 ; H01L27/02

Abstract:
A SRAM cell and a forming method thereof are provided. The SRAM cell includes: a pull-up transistor, a pull-down transistor, a pass gate transistor, a tensile stress film which covers the pull-up transistor and the pull-down transistor, and an interlayer dielectric isolating layer which covers the tensile stress film and the pass gate transistor. The method includes: providing a semiconductor substrate; forming a pull-up transistor, a pull-down transistor and a pass gate transistor on the semiconductor substrate; forming a tensile stress film covering the pull-up and pull-down transistors; and forming an interlayer dielectric isolating layer covering the tensile stress film and the pass gate transistor. Write margin of the SRAM cell may be increased and an area of the SRAM cell may be reduced.
Public/Granted literature
- US20150194431A1 STATIC RANDOM ACCESS MEMORY CELL AND FORMING METHOD THEREOF Public/Granted day:2015-07-09
Information query
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