Invention Grant
US09312289B2 Photoelectric conversion apparatus, manufacturing method thereof, and image pickup system 有权
光电转换装置及其制造方法以及摄像系统

Photoelectric conversion apparatus, manufacturing method thereof, and image pickup system
Abstract:
A light guide portion includes a low refractive index portion and a high refractive index portion. The low refractive index portion has a refractive index equal to or lower than that of an insulating layer. The high refractive index portion has a refractive index higher than that of the low refractive index portion. The low refractive index portion is located above a separating portion, and is sandwiched by the high refractive index portion in a first direction. A width in the first direction of the low refractive index portion at a first position distant from the separating portion in a second direction is narrower than a width in the first direction of the low refractive index portion at a second position closer to the separating portion than the first position in the second direction.
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