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US09312408B2 Imager having a reduced dark current through an increased bulk doping level 有权
成像器通过增加的体积掺杂水平具有减小的暗电流

Imager having a reduced dark current through an increased bulk doping level
Abstract:
The disclosure relates to an image sensor comprising a substrate region in a semiconductor material; an active layer in contact with the substrate region; and a photodiode array formed in the active layer. The substrate region has a doping level such that the resistivity of the substrate region is less than 6 mOhm·cm.
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