Invention Grant
- Patent Title: Method of manufacturing an ultrasonic transducer electrode assembly
- Patent Title (中): 制造超声波换能器电极组件的方法
-
Application No.: US14106897Application Date: 2013-12-16
-
Publication No.: US09312470B2Publication Date: 2016-04-12
- Inventor: Cheryl Rice , Dongjuan Chris Xi
- Applicant: Volcano Corporation
- Applicant Address: US CA San Diego
- Assignee: Volcano Corporation
- Current Assignee: Volcano Corporation
- Current Assignee Address: US CA San Diego
- Agency: Haynes and Boone, LLP
- Main IPC: H01L41/31
- IPC: H01L41/31 ; B06B1/06 ; A61B8/00 ; H01L41/047 ; H01L41/09 ; H01L41/29 ; A61B8/12 ; A61B8/08
Abstract:
A method of fabricating an ultrasound transducer includes providing a substrate having a first side and a second side opposite the first side. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.
Public/Granted literature
- US20140187956A1 Ultrasonic Transducer Electrode Assembly Public/Granted day:2014-07-03
Information query
IPC分类:
