Invention Grant
- Patent Title: Vertical hall effect sensor
- Patent Title (中): 垂直霍尔效应传感器
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Application No.: US14041063Application Date: 2013-09-30
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Publication No.: US09312473B2Publication Date: 2016-04-12
- Inventor: Steven Kosier , Noel Hoilien
- Applicant: Allegro Microsystems, LLC
- Applicant Address: US MA Worcester
- Assignee: Allegro Microsystems, LLC
- Current Assignee: Allegro Microsystems, LLC
- Current Assignee Address: US MA Worcester
- Agency: Daly, Crowley, Mofford & Durkee, LLP
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/06 ; G01R33/07 ; H01L43/14

Abstract:
In one aspect, a vertical Hall effect sensor includes a semiconductor wafer having a first conductivity type and a plurality of semiconductive electrodes disposed on the semiconductor wafer. The plurality of semiconductive electrodes have the first conductivity type and include a source electrode, a first sensing electrode and a second sensing electrode, arranged such that the source electrode is between the first sensing electrode and the sensing electrode and a first drain electrode and a second drain electrode, arranged such that the first sensing electrode, second sensing electrode, and source electrode are between the first drain electrode and the second drain electrode. The vertical Hall effect sensor also includes a plurality of semiconductor fingers disposed on the semiconductor wafer and interdigitated with the plurality of semiconductive electrodes, the semiconductor fingers having a second conductivity type.
Public/Granted literature
- US20150091112A1 VERTICAL HALL EFFECT SENSOR Public/Granted day:2015-04-02
Information query
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