Invention Grant
- Patent Title: Method of recovering a bonding apparatus from a bonding failure
- Patent Title (中): 从接合故障中恢复接合装置的方法
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Application No.: US13350363Application Date: 2012-01-13
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Publication No.: US09314869B2Publication Date: 2016-04-19
- Inventor: Wai Wah Lee , Jun Feng Li , Wei Boon Wong , Soo Kin Kenny Tan
- Applicant: Wai Wah Lee , Jun Feng Li , Wei Boon Wong , Soo Kin Kenny Tan
- Applicant Address: SG Singapore
- Assignee: ASM Technology Singapore Pte. Ltd.
- Current Assignee: ASM Technology Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Sughrue Mion, PLLC
- Main IPC: B23K20/00
- IPC: B23K20/00 ; H01L23/00

Abstract:
A method of recovering a bonding apparatus from a bonding failure to resume a normal operating state for semiconductor chip fabrication is disclosed. The bonding apparatus comprises: i) a bonding tool for bonding a wire between a semiconductor chip and a substrate; and ii) a position sensor. Specifically, the method comprises the steps of: a) the position sensor determining a position of the bonding tool when the bonding tool contacts a surface to bond the wire to the substrate; b) the bonding apparatus detecting a bonding failure caused by detachment of the semiconductor from the substrate based on the position of the bonding tool; and c) the bonding apparatus detaching the semiconductor chip from the wire.
Public/Granted literature
- US20130180957A1 METHOD OF RECOVERING A BONDING APPARATUS FROM A BONDING FAILURE Public/Granted day:2013-07-18
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