Invention Grant
US09315670B2 Composition for forming resist underlayer film and patterning process 有权
用于形成抗蚀剂下层膜的组合物和图案化工艺

Composition for forming resist underlayer film and patterning process
Abstract:
The invention provides a composition for forming a resist underlayer film including: as a component (A), a silicon-containing compound obtained by hydrolysis and/or condensation of one or more kinds of silicon compounds represented by the following general formula (A-1). There can be provided a composition for forming a resist underlayer film having etching selectivity relative to a conventional organic film and a silicon-containing film and favorable pattern adhesiveness relative to fine pattern even in a complicated patterning process. R1Aa1R2Aa2R3Aa3Si(OR0A)(4-a1-a2-a3)  (A-1)
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