Invention Grant
US09315670B2 Composition for forming resist underlayer film and patterning process
有权
用于形成抗蚀剂下层膜的组合物和图案化工艺
- Patent Title: Composition for forming resist underlayer film and patterning process
- Patent Title (中): 用于形成抗蚀剂下层膜的组合物和图案化工艺
-
Application No.: US14165921Application Date: 2014-01-28
-
Publication No.: US09315670B2Publication Date: 2016-04-19
- Inventor: Tsutomu Ogihara , Jun Hatakeyama
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2013-027781 20130215
- Main IPC: G03F7/075
- IPC: G03F7/075 ; G03F7/09 ; G03F7/20 ; C08L83/08 ; G03F7/00 ; B82Y10/00 ; B82Y40/00

Abstract:
The invention provides a composition for forming a resist underlayer film including: as a component (A), a silicon-containing compound obtained by hydrolysis and/or condensation of one or more kinds of silicon compounds represented by the following general formula (A-1). There can be provided a composition for forming a resist underlayer film having etching selectivity relative to a conventional organic film and a silicon-containing film and favorable pattern adhesiveness relative to fine pattern even in a complicated patterning process. R1Aa1R2Aa2R3Aa3Si(OR0A)(4-a1-a2-a3) (A-1)
Public/Granted literature
- US20140235796A1 COMPOSITION FOR FORMING RESIST UNDERLAYER FILM AND PATTERNING PROCESS Public/Granted day:2014-08-21
Information query
IPC分类: