Invention Grant
- Patent Title: Polishing slurry and polishing method
- Patent Title (中): 抛光浆和抛光方法
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Application No.: US14347637Application Date: 2012-10-12
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Publication No.: US09318339B2Publication Date: 2016-04-19
- Inventor: Ryuichi Sato , Yohei Maruyama , Atsushi Koike
- Applicant: MITSUI MINING & SMELTING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: MITSUI MINING & SMELTING, LTD
- Current Assignee: MITSUI MINING & SMELTING, LTD
- Current Assignee Address: JP Tokyo
- Agency: Roberts & Roberts, LLP
- Priority: JP2011-225625 20111013; JP2012-018931 20120131
- International Application: PCT/JP2012/076446 WO 20121012
- International Announcement: WO2013/054883 WO 20130418
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H01L21/306 ; H01L21/02 ; B24B37/04 ; C09K3/14 ; H01L29/16 ; H01L29/20

Abstract:
The present invention provides a polishing slurry capable of polishing even high-hardness materials such as silicon carbide and gallium nitride at a high polishing speed. The present invention is a polishing slurry including a slurry containing a manganese oxide particle and a manganate ion for polishing high-hardness materials having a Mohs hardness of 8 or higher. In the present invention, the manganese oxide particle in the slurry is preferably 1.0 mass % or more; the manganese oxide is preferably manganese dioxide; and the manganate ion is preferably permanganate ion. The polishing slurry according to the present invention enables even high-hardness hardly-machinable materials such as silicon carbide and gallium nitride to be polished smoothly at a high speed.
Public/Granted literature
- US20140242750A1 POLISHING SLURRY, AND POLISHING METHOD Public/Granted day:2014-08-28
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