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US09318687B2 Piezoelectric element, piezoelectric device, ink-jet head, and ink-jet printer 有权
压电元件,压电元件,喷墨头和喷墨打印机

Piezoelectric element, piezoelectric device, ink-jet head, and ink-jet printer
Abstract:
A piezoelectric element having an electrode, a seed layer for controlling the crystal orientation of a piezoelectric layer, and the piezoelectric layer stacked in this order from the substrate side. The seed layer is composed of two or more layers stacked together each comprising crystals of spherical particles.
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