Invention Grant
- Patent Title: Determining a value of a variable on an RF transmission model
- Patent Title (中): 确定RF传输模型上变量的值
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Application No.: US13717538Application Date: 2012-12-17
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Publication No.: US09320126B2Publication Date: 2016-04-19
- Inventor: John C. Valcore, Jr. , Bradford J. Lyndaker
- Applicant: John C. Valcore, Jr. , Bradford J. Lyndaker
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: G01R25/00
- IPC: G01R25/00 ; H05H1/46 ; H03H7/40 ; H01J37/32 ; G06F17/50 ; H01P3/00

Abstract:
Systems and methods for determining a value of a variable on a radio frequency (RF) transmission model are described. One of the methods includes identifying a complex voltage and current measured at an output of an RF generator and generating an impedance matching model based on electrical components defined in an impedance matching circuit coupled to the RF generator. The method further includes propagating the complex voltage and current through the one or more elements from the input of the impedance matching model and through one or more elements of an RF transmission model portion that is coupled to the impedance matching model to determine a complex voltage and current at the output of the RF transmission model portion.
Public/Granted literature
- US20140172335A1 DETERMINING A VALUE OF A VARIABLE ON AN RF TRANSMISSION MODEL Public/Granted day:2014-06-19
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