Invention Grant
- Patent Title: Electromechanical transducer, liquid droplet discharge head, and image forming apparatus
- Patent Title (中): 机电换能器,液滴喷射头和图像形成装置
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Application No.: US14748517Application Date: 2015-06-24
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Publication No.: US09321263B2Publication Date: 2016-04-26
- Inventor: Toshiaki Masuda , Keishi Miwa
- Applicant: Toshiaki Masuda , Keishi Miwa
- Applicant Address: JP Tokyo
- Assignee: RICOH COMPANY, LTD.
- Current Assignee: RICOH COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Cooper & Dunham LLP
- Priority: JP2014-136980 20140702
- Main IPC: B41J2/045
- IPC: B41J2/045 ; B41J2/14 ; H01L41/047

Abstract:
An electromechanical transducer includes a substrate; a diaphragm formed on the substrate; and a piezoelectric element that includes a lower electrode; a piezoelectric member; and an upper electrode, in which a lower electrode film to form the lower electrode, a piezoelectric film to form the piezoelectric member, and an upper electrode film to form the upper electrode are laminated in layers on the diaphragm formed on the substrate. The piezoelectric element is formed such that the lower electrode film, the piezoelectric member film, and the upper electrode film are patterned to form the lower electrode, the piezoelectric member, and the upper electrode, each of which has a desired pattern; and corners of the lower electrode are rounded.
Public/Granted literature
- US20160001556A1 ELECTROMECHANICAL TRANSDUCER, LIQUID DROPLET DISCHARGE HEAD, AND IMAGE FORMING APPARATUS Public/Granted day:2016-01-07
Information query
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