Invention Grant
US09321626B2 Method of packaging a MEMS transducer device and packaged MEMS transducer device 有权
包装MEMS换能器装置和封装的MEMS换能器装置的方法

Method of packaging a MEMS transducer device and packaged MEMS transducer device
Abstract:
A packaged MEMS transducer device comprising: a die, including: a semiconductor body having a front side and a back side, opposite to one another in a first direction, at least one cavity extending through the semiconductor body between the front side and the back side, and at least one membrane extending on the front side at least partially suspended over the cavity; and a package designed to house the die on an inner surface thereof. The transducer device moreover includes a sealing layer extending on the back side of the semiconductor body for sealing the cavity, and includes a paste layer extending between the sealing layer and the inner surface of the package for firmly coupling the die to the package.
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