Invention Grant
- Patent Title: Sensor with vacuum-sealed cavity
- Patent Title (中): 传感器带真空密封腔
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Application No.: US13772183Application Date: 2013-02-20
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Publication No.: US09321630B2Publication Date: 2016-04-26
- Inventor: Jinghui Xu , Julius Ming-Lin Tsai , Winston Sun , Chengliang Sun
- Applicant: PGS Geophysical AS , Agency for Science Technology and Research (A*STAR)
- Applicant Address: NO Oslo SG Connexis
- Assignee: PGS Geophysical AS,Agency For Science Technology and Research (A*STAR)
- Current Assignee: PGS Geophysical AS,Agency For Science Technology and Research (A*STAR)
- Current Assignee Address: NO Oslo SG Connexis
- Agency: Meyertons, Hood, Kivlin, Kowert & Goetzel, P.C.
- Main IPC: B81C1/00
- IPC: B81C1/00 ; G01V1/18 ; G01H11/08

Abstract:
A method and apparatus for detecting underwater sounds is disclosed. An embodiment of the apparatus includes a substrate with a vacuum-sealed cavity. A support structure and an acoustic pressure sensor are situated on the substrate. The support structure of the apparatus may include a first oxide layer situated on the substrate, a silicon layer situated on the first oxide layer, and a second oxide layer situated on the silicon layer. The acoustic pressure sensor of the apparatus includes a first electrode layer situated on the substrate, a piezoelectric layer situated on the first electrode layer, and a second electrode layer situated on the piezoelectric layer. In one embodiment, the surface area of the second electrode layer is between about 70 to 90 percent of the surface area of the piezoelectric layer. In various embodiments, the support structure is thicker than the piezoelectric layer.
Public/Granted literature
- US20140230557A1 SENSOR WITH VACUUM-SEALED CAVITY Public/Granted day:2014-08-21
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