Invention Grant
- Patent Title: Method for producing a substrate holder
- Patent Title (中): 用于制造衬底保持器的方法
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Application No.: US14000354Application Date: 2012-02-16
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Publication No.: US09321636B2Publication Date: 2016-04-26
- Inventor: Frank Fournel , Laurent Bally , Marc Zussy
- Applicant: Frank Fournel , Laurent Bally , Marc Zussy
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1151340 20110218
- International Application: PCT/EP2012/052672 WO 20120216
- International Announcement: WO2012/110591 WO 20120823
- Main IPC: B44C1/22
- IPC: B44C1/22 ; B81C3/00 ; H01L21/20 ; H01L21/683

Abstract:
A method for producing a holder of at least one substrate from a first and a second plate, each including first and second parallel flat faces, the method including: a) delimitation on the first face of the second plate of plural surfaces by a non-bondable area in which a direct bonding with a face of the first plate is prevented; b) bringing the first face of the second plate into contact with the first face of the first plate; c) direct bonding between the first faces except in the non-bondable area; and d) removal of the portions of the second plate located vertically below surfaces inside the non-bondable area.
Public/Granted literature
- US20140014618A1 METHOD FOR PRODUCING A SUBSTRATE HOLDER Public/Granted day:2014-01-16
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