Invention Grant
- Patent Title: Film-forming apparatus
- Patent Title (中): 成膜装置
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Application No.: US14069897Application Date: 2013-11-01
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Publication No.: US09322094B2Publication Date: 2016-04-26
- Inventor: Yuji Kajihara , Yasushi Yasumatsu , Kazuya Konaga
- Applicant: CANON ANELVA CORPORATION
- Applicant Address: JP Kawasaki-shi
- Assignee: CANON ANELVA CORPORATION
- Current Assignee: CANON ANELVA CORPORATION
- Current Assignee Address: JP Kawasaki-shi
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2011-145152 20110630
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/34 ; C23C14/04 ; C23C14/50 ; C23C14/54 ; C23C14/56 ; H01J37/34

Abstract:
The present invention provides a film forming apparatus configured such that the occurrence of contamination is reduced between targets. The film forming apparatus includes: a plurality of target electrodes respectively having attachment surfaces to which targets can be attached; a substrate holder for holding a substrate at a position opposing the plurality of target electrodes; a first shutter member rotatably provided between the plurality of target electrodes and the substrate holder and having a plurality of openings that can oppose the attachment surfaces; and a shield member disposed adjacent to the first shutter member and having a number of openings equal to the number of the target electrodes, wherein a gap between the first shutter member and the shield member widens toward an outer perimeter from a portion where adjacent target electrodes are closest.
Public/Granted literature
- US20140054167A1 FILM-FORMING APPARATUS Public/Granted day:2014-02-27
Information query
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