Invention Grant
- Patent Title: Film-forming apparatus
- Patent Title (中): 成膜装置
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Application No.: US14053940Application Date: 2013-10-15
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Publication No.: US09322095B2Publication Date: 2016-04-26
- Inventor: Yuji Kajihara , Yasushi Yasumatsu , Kazuya Konaga
- Applicant: CANON ANELVA CORPORATION
- Applicant Address: JP Kawasaki-shi
- Assignee: CANON ANELVA CORPORATION
- Current Assignee: CANON ANELVA CORPORATION
- Current Assignee Address: JP Kawasaki-shi
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2011-100784 20110428
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/56 ; H01J37/32 ; H01J37/34

Abstract:
A film-forming apparatus includes a plurality of target electrodes, a substrate holder for holding a substrate, a first shutter member rotatably provided between the plurality of target electrodes and the substrate holder and having a plurality of openings, first separating walls provided on a surface of the first shutter member, the surface being on the target electrode side; and second separating walls provided between the first shutter member and the target electrodes, wherein the first separating walls are provided so as to sandwich each of the plurality of openings of the first shutter member.
Public/Granted literature
- US20140034489A1 FILM-FORMING APPARATUS Public/Granted day:2014-02-06
Information query
IPC分类: