Invention Grant
- Patent Title: Apparatus and method for production of SiC single crystal
- Patent Title (中): SiC单晶生产装置及方法
-
Application No.: US13326638Application Date: 2011-12-15
-
Publication No.: US09322112B2Publication Date: 2016-04-26
- Inventor: Tomokazu Ishii , Hidemitsu Sakamoto , Kazuhiko Kusunoki , Kazuhito Kamei
- Applicant: Tomokazu Ishii , Hidemitsu Sakamoto , Kazuhiko Kusunoki , Kazuhito Kamei
- Applicant Address: JP Toyota-shi, Aichi-ken
- Assignee: Toyota Jidosha Kabushiki Kaisha
- Current Assignee: Toyota Jidosha Kabushiki Kaisha
- Current Assignee Address: JP Toyota-shi, Aichi-ken
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP2010-293354 20101228
- Main IPC: C30B15/20
- IPC: C30B15/20 ; C30B29/36 ; C30B17/00

Abstract:
To suppress 3D or convex growth and ensure a high flatness, an apparatus for producing an SiC single crystal includes: a container which holds an SiC solution, a portion for maintaining the solution in the container at a suitable temperature, a shaft having a lower end part acting as a portion for holding an SiC seed crystal in planar contact with an overall back surface of a crystal growth face and acting as a portion for cooling the SiC seed crystal, and a portion of the holding shaft for enabling an SiC single crystal to continuously grow at the crystal growth face by maintaining the crystal growth face brought into contact with the solution, a lower end part of the shaft having a portion for obtaining a uniform in-plane temperature distribution of the crystal growth face brought into planar contact, and a method for the same.
Public/Granted literature
- US20120160153A1 APPARATUS AND METHOD FOR PRODUCTION OF SiC SINGLE CRYSTAL Public/Granted day:2012-06-28
Information query
IPC分类: