Invention Grant
- Patent Title: Surface measurement instrument and calibration thereof
- Patent Title (中): 表面测量仪器及其校准
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Application No.: US13581900Application Date: 2011-03-01
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Publication No.: US09322631B2Publication Date: 2016-04-26
- Inventor: Paul J. Scott
- Applicant: Paul J. Scott
- Applicant Address: GB Leicester, Leicestershire
- Assignee: Taylor Hobson Limited
- Current Assignee: Taylor Hobson Limited
- Current Assignee Address: GB Leicester, Leicestershire
- Agency: RatnerPrestia
- Priority: GB1003458.5 20100302
- International Application: PCT/GB2011/050400 WO 20110301
- International Announcement: WO2011/107784 WO 20110909
- Main IPC: G01B5/20
- IPC: G01B5/20 ; G06F17/11 ; G06F15/00 ; G01B5/252 ; G01B7/312
Abstract:
A method of calibrating a surface measurement instrument includes rotating a work piece having an undulating surface on a turntable of a metrological apparatus; measuring the surface of the work piece at a plurality of rotational positions; analyzing the results of the measurement to determine parameters describing an error causing characteristic of the metrological apparatus; and using the determined parameters to correct measurement data for the error causing characteristic of the metrological apparatus.
Public/Granted literature
- US20130054194A1 SURFACE MEASUREMENT INSTRUMENT AND CALIBRATION THEREOF Public/Granted day:2013-02-28
Information query
