Invention Grant
US09322726B2 Pressure sensor, acceleration sensor, and method for manufacturing pressure sensor
有权
压力传感器,加速度传感器和制造压力传感器的方法
- Patent Title: Pressure sensor, acceleration sensor, and method for manufacturing pressure sensor
- Patent Title (中): 压力传感器,加速度传感器和制造压力传感器的方法
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Application No.: US14565755Application Date: 2014-12-10
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Publication No.: US09322726B2Publication Date: 2016-04-26
- Inventor: Hideaki Fukuzawa , Yoshihiko Fuji , Yoshihiro Higashi , Michiko Hara
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P
- Priority: JP2014-008022 20140120
- Main IPC: G01L1/12
- IPC: G01L1/12 ; G01L1/22 ; G01P15/105 ; G01L9/16

Abstract:
According to one embodiment, a pressure sensor includes a base and a sensor unit provided on the base. The sensor unit includes a transducing thin film having a first surface, a first strain sensing element provided on the first surface, and a second strain sensing element provided on the first surface. The first strain sensing element includes a first magnetic layer, a first film having a first oxygen concentration, a second magnetic layer provided between the first magnetic layer and the first film, and a first intermediate layer provided between the first and the second magnetic layer. The second strain sensing element includes a third magnetic layer, a second film having a second oxygen concentration different from the first concentration, a fourth magnetic layer provided between the third magnetic layer and the second film, and a second intermediate layer provided between the third and the fourth magnetic layer.
Public/Granted literature
- US20150204739A1 PRESSURE SENSOR, ACCELERATION SENSOR, AND METHOD FOR MANUFACTURING PRESSURE SENSOR Public/Granted day:2015-07-23
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