Invention Grant
- Patent Title: Probe card for power device
- Patent Title (中): 电源设备探头卡
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Application No.: US14234679Application Date: 2012-07-30
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Publication No.: US09322844B2Publication Date: 2016-04-26
- Inventor: Eiichi Shinohara , Ikuo Ogasawara , Ken Taoka
- Applicant: Eiichi Shinohara , Ikuo Ogasawara , Ken Taoka
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2011-168425 20110801
- International Application: PCT/JP2012/069925 WO 20120730
- International Announcement: WO2013/018910 WO 20130207
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R31/26

Abstract:
A probe card 10 includes a first probe 11 configured to come into electric contact with an emitter electrode of a power device D; a block-shaped first connecting terminal 12 to which the first probe 11 is connected; a second probe 13 configured to come into electric contact with a gate electrode of the power device D; a block-shaped second connecting terminal 14 to which the second probe 13 is connected; a contact plate 15 configured to come into electric contact with a collector electrode of the power device D; and a block-shaped third connecting terminal 16 fixed to the contact plate 15. Further, the first connecting terminal 12, the second connecting terminal 14 and the third connecting terminal 16 electrically come into direct contact with corresponding connection terminals of a tester, respectively.
Public/Granted literature
- US20140176173A1 PROBE CARD FOR POWER DEVICE Public/Granted day:2014-06-26
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