Invention Grant
- Patent Title: Interference filter having Ag—Bi—Nd alloy film
- Patent Title (中): 具有Ag-Bi-Nd合金膜的干涉滤光片
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Application No.: US13742701Application Date: 2013-01-16
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Publication No.: US09322966B2Publication Date: 2016-04-26
- Inventor: Susumu Shinto , Koji Kitahara , Tomonori Matsushita
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-007819 20120118
- Main IPC: G02B5/28
- IPC: G02B5/28 ; G01J1/04 ; G02B5/08 ; G02B26/00

Abstract:
An interference filter includes first and second reflecting films opposed to each other across a gap, the first and second reflecting films include an Ag—Sm—Cu alloy film or an Ag—Bi—Nd alloy film, the Ag—Sm—Cu alloy film includes 0.1 atomic %≦Sm≦0.5 atomic %, and 0.1 atomic %≦Cu and ≦0.5 atomic %, and Sm+Cu≦1.0 atomic %, the Ag—Bi—Nd alloy film includes 0.1 atomic %≦Bi≦3.0 atomic %, and 0.1 atomic %≦Nd≦5.0 atomic %, and the thickness of the Ag—Sm—Cu alloy film or the Ag—Bi—Nd alloy film is ≧10 nm and ≦40 nm.
Public/Granted literature
- US20130181120A1 INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC APPARATUS Public/Granted day:2013-07-18
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