Invention Grant
US09323146B2 Photoresist composition, resist pattern-forming method, compound, acid generating agent, and photodegradable base
有权
光刻胶组合物,抗蚀剂图案形成法,化合物,酸产生剂和可光降解碱
- Patent Title: Photoresist composition, resist pattern-forming method, compound, acid generating agent, and photodegradable base
- Patent Title (中): 光刻胶组合物,抗蚀剂图案形成法,化合物,酸产生剂和可光降解碱
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Application No.: US14470108Application Date: 2014-08-27
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Publication No.: US09323146B2Publication Date: 2016-04-26
- Inventor: Hayato Namai , Kazuo Nakahara , Norihiko Ikeda
- Applicant: JSR CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-040802 20120227
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C07D317/70 ; G03F7/039 ; G03F7/11 ; G03F7/20

Abstract:
A photoresist composition containing a polymer having a structural unit including an acid-labile group, and a compound represented by the formula (1). In the formula (1), R1 represents a hydrogen atom or a monovalent acid-labile group. R2 represents an alicyclic hydrocarbon group having 3 to 20 carbon atoms and a valency of (m+1). m is an integer of 2 to 5. R3 and R4 each independently represent a hydrogen atom, a fluorine atom, a monovalent hydrocarbon group having 1 to 20 carbon atoms or a monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms. n is an integer of 0 to 5. At least two of a plurality of R1s optionally taken together represent a ring structure, together with a plurality of oxygen atoms bonding to R1 and the carbon atom(s) constituting R2 and bonding to these oxygen atoms. M+ represents a monovalent radiation-degradable onium cation.
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