Invention Grant
- Patent Title: Methanofullerenes
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Application No.: US14187649Application Date: 2014-02-24
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Publication No.: US09323149B2Publication Date: 2016-04-26
- Inventor: Alex Philip Graham Robinson , Jon Andrew Preece , Richard Edward Palmer , Andreas Frommhold , Dongxu Yang , Alexandra McClelland , Drew Athans , Xiang Xue
- Applicant: Alex Philip Graham Robinson , Jon Andrew Preece , Richard Edward Palmer , Andreas Frommhold , Dongxu Yang , Alexandra McClelland , Drew Athans , Xiang Xue
- Applicant Address: GB Swansea, Wales
- Assignee: IRRESISTIBLE MATERIALS LTD
- Current Assignee: IRRESISTIBLE MATERIALS LTD
- Current Assignee Address: GB Swansea, Wales
- Agency: The Patent Practice of Szmanda & Shenut, LLC
- Agent James G. Shenut; Charles R. Szmanda
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/038 ; G03F7/20 ; G03F7/38

Abstract:
The present disclosure relates to novel methanofullerene derivatives, negative-type photoresist compositions prepared therefrom and methods of using them. The derivatives, their photoresist compositions and the methods are ideal for fine pattern processing using, for example, ultraviolet radiation, beyond extreme ultraviolet radiation, extreme ultraviolet radiation, X-rays and charged particle rays. Negative photosensitive compositions are also disclosed.
Public/Granted literature
- US20140255849A1 Methanofullerenes Public/Granted day:2014-09-11
Information query
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