Invention Grant
US09323163B2 Cylindrical reticle system, exposure apparatus and exposure method 有权
圆柱标线系统,曝光装置和曝光方法

Cylindrical reticle system, exposure apparatus and exposure method
Abstract:
A cylindrical reticle system is provided for performing a unidirectional scan-exposure. The cylindrical reticle system includes a base and a center shaft fixed a one side of the base. The cylindrical reticle system also includes a first bearing fixed at the end of the center shaft near to the base and a second bearing fixed at the other end of the center shaft far from the base. Further, the cylindrical reticle system includes a cylindrical reticle having an imaging region and two non-imaging regions at both end of the imaging region.
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