Invention Grant
US09324520B2 Vacuum chamber with a one-piece metallic cover for self-centering 有权
真空室具有一体式金属盖,用于自定心

Vacuum chamber with a one-piece metallic cover for self-centering
Abstract:
The disclosure relates to a vacuum chamber including at least one ceramic isolating cylinder with two face ends. At least one of the two face ends of the ceramic isolating cylinder is closed by a metallic cover including an outer and an inner part. A distal end of the outer part of the metallic cover is thinner relative to the remainder of the outer part of the metallic cover and forms a metallic lid. The metallic lid is connected to at least one of the two face ends of the ceramic isolating cylinder in a vacuum tight manner. The metallic cover can be formed in one piece and fits with the inner part of the metallic cover at an inner girthed area of the ceramic isolating cylinder to realize a self-centering of the metallic lid to at least one of the two face ends of the ceramic isolating cylinder.
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