Invention Grant
- Patent Title: Hard mask reshaping
- Patent Title (中): 硬面具重塑
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Application No.: US14167068Application Date: 2014-01-29
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Publication No.: US09324578B2Publication Date: 2016-04-26
- Inventor: Han-Wen Liao , Chih-Yu Lin , Cherng-Chang Tsuei
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
- Applicant Address: unknown Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: unknown Hsin-Chu
- Agency: Cooper Legal Group, LLC
- Main IPC: H01L21/3213
- IPC: H01L21/3213 ; H01L21/033 ; H01L21/02 ; H01L21/311

Abstract:
One or more systems and methods for reshaping a hard mask are provided. A semiconductor arrangement comprises one or more structures formed from a layer according to a target dimension, such as a width criterion, a length criterion, a spacing criterion, or other design constraints. To form such a structure, a hard mask is formed over the layer. Responsive to a dimension, such as a width, of the hard mask not corresponding to the target dimension, a first hard mask portion is modified to create a modified hard mask comprising a modified first hard mask portion. In some embodiments, the first hard mask portion is trimmed to decrease the dimension or coated with a coating material to increase the dimension. An etch of the layer is performed through the modified hard mask to create an etched layer comprising an etched portion, such as the structure, corresponding to the target dimension.
Public/Granted literature
- US20150214063A1 HARD MASK RESHAPING Public/Granted day:2015-07-30
Information query
IPC分类: