Invention Grant
US09324595B2 Load port apparatus and method of detecting object to be processed
有权
负载端口设备和检测待处理对象的方法
- Patent Title: Load port apparatus and method of detecting object to be processed
- Patent Title (中): 负载端口设备和检测待处理对象的方法
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Application No.: US13617635Application Date: 2012-09-14
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Publication No.: US09324595B2Publication Date: 2016-04-26
- Inventor: Mutsuo Sasaki , Hiroshi Igarashi , Tomoshi Abe
- Applicant: Mutsuo Sasaki , Hiroshi Igarashi , Tomoshi Abe
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P
- Priority: JP2011-208693 20110926
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677

Abstract:
To enable appropriate wafer mapping in the case where a wafer is stored at the highest level, which is provided as a reserve, of a pod, a load port apparatus drives a mapping frame that supports a sensor by a first driving unit that drives the mapping frame in a first direction parallel to the direction along which wafers in the pod are arranged in an overlapping manner and a second driving unit that drives the mapping frame in a second direction that crosses the first direction in such a way as to form an acute angle in the side in which the sensor starts the mapping.
Public/Granted literature
- US20130074615A1 LOAD PORT APPARATUS AND METHOD OF DETECTING OBJECT TO BE PROCESSED Public/Granted day:2013-03-28
Information query
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