Invention Grant
US09324605B2 Method of fabricating a vertically oriented inductor within interconnect structures and capacitor structure thereof 有权
在互连结构及其电容器结构内制造垂直取向的电感器的方法

Method of fabricating a vertically oriented inductor within interconnect structures and capacitor structure thereof
Abstract:
The present disclosure involves a method of fabricating a semiconductor device. The method includes providing a substrate having a horizontal surface. The method includes forming an interconnect structure over the horizontal surface of the substrate. The forming the interconnect structure includes forming an inductor coil that is wound substantially in a vertical plane that is orthogonal to the horizontal surface of the substrate. The forming the interconnect structure includes forming a capacitor disposed proximate to the inductor coil. The capacitor has an anode component and a cathode component. The inductor coil and the capacitor each include a plurality of horizontally extending elongate members.
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