Invention Grant
- Patent Title: Method of fabricating a vertically oriented inductor within interconnect structures and capacitor structure thereof
- Patent Title (中): 在互连结构及其电容器结构内制造垂直取向的电感器的方法
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Application No.: US14486675Application Date: 2014-09-15
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Publication No.: US09324605B2Publication Date: 2016-04-26
- Inventor: Hsiu-Ying Cho
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/768 ; H01L23/522 ; H01L23/552 ; H01L25/16

Abstract:
The present disclosure involves a method of fabricating a semiconductor device. The method includes providing a substrate having a horizontal surface. The method includes forming an interconnect structure over the horizontal surface of the substrate. The forming the interconnect structure includes forming an inductor coil that is wound substantially in a vertical plane that is orthogonal to the horizontal surface of the substrate. The forming the interconnect structure includes forming a capacitor disposed proximate to the inductor coil. The capacitor has an anode component and a cathode component. The inductor coil and the capacitor each include a plurality of horizontally extending elongate members.
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