Invention Grant
US09324631B2 Semiconductor device including a stress buffer material formed above a low-k metallization system
有权
半导体器件包括形成在低k金属化系统之上的应力缓冲材料
- Patent Title: Semiconductor device including a stress buffer material formed above a low-k metallization system
- Patent Title (中): 半导体器件包括形成在低k金属化系统之上的应力缓冲材料
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Application No.: US13870411Application Date: 2013-04-25
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Publication No.: US09324631B2Publication Date: 2016-04-26
- Inventor: Axel Walter , Matthias Lehr
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDIRES Inc.
- Current Assignee: GLOBALFOUNDIRES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Priority: DE102009035437 20090731
- Main IPC: H01L23/58
- IPC: H01L23/58 ; H01L23/48 ; H01L23/528 ; H01L23/532 ; H01L23/00 ; H01L23/31 ; H01L23/367 ; H01L23/552

Abstract:
A bump structure or pillar structure formed above a metallization system of a complex semiconductor device may include a stress buffer layer, which may efficiently distribute the resulting mechanical stress which may typically occur during the chip package interaction due to a thermal mismatch of these components. The stress buffer layer comprises copper-based buffer regions that cover a significant portion of the overall surface, wherein a thickness of approximately 3-10 μm may also be used. Moreover, the buffer regions may efficiently replace aluminum as a terminal metal active region.
Public/Granted literature
- US20130234300A1 SEMICONDUCTOR DEVICE INCLUDING A STRESS BUFFER MATERIAL FORMED ABOVE A LOW-K METALLIZATION SYSTEM Public/Granted day:2013-09-12
Information query
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