Invention Grant
US09324631B2 Semiconductor device including a stress buffer material formed above a low-k metallization system 有权
半导体器件包括形成在低k金属化系统之上的应力缓冲材料

Semiconductor device including a stress buffer material formed above a low-k metallization system
Abstract:
A bump structure or pillar structure formed above a metallization system of a complex semiconductor device may include a stress buffer layer, which may efficiently distribute the resulting mechanical stress which may typically occur during the chip package interaction due to a thermal mismatch of these components. The stress buffer layer comprises copper-based buffer regions that cover a significant portion of the overall surface, wherein a thickness of approximately 3-10 μm may also be used. Moreover, the buffer regions may efficiently replace aluminum as a terminal metal active region.
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