Invention Grant
- Patent Title: Semiconductor interconnect structure having a graphene-based barrier metal layer
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Application No.: US14525886Application Date: 2014-10-28
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Publication No.: US09324635B2Publication Date: 2016-04-26
- Inventor: Junjing Bao , Samuel S. S. Choi , Xuesong Li , Shaoning Yao
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Maeve L. McCarthy; Adbul-Samad A. Adediran
- Main IPC: H01L23/482
- IPC: H01L23/482 ; H01L23/532 ; H01L21/768 ; H01L23/48 ; B82Y40/00

Abstract:
An interconnect structure and method for fabricating the interconnect structure having enhanced performance and reliability, by utilizing a graphene-based barrier metal layer to block oxygen intrusion from a dielectric layer into the interconnect structure and block copper diffusion from the interconnect structure into the dielectric layer, are disclosed. At least one opening is formed in a dielectric layer. A graphene-based barrier metal layer disposed on the dielectric layer is formed. A seed layer disposed on the graphene-based barrier metal layer is formed. An electroplated copper layer disposed on the seed layer is formed. A planarized surface is formed, wherein a portion of the graphene-based barrier metal layer, the seed layer, and the electroplated copper layer are removed. In addition, a capping layer disposed on the planarized surface is formed.
Public/Granted literature
- US20150041981A1 SEMICONDUCTOR INTERCONNECT STRUCTURE HAVING A GRAPHENE-BASED BARRIER METAL LAYER Public/Granted day:2015-02-12
Information query
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