Invention Grant
US09324659B2 Semiconductor device and method of forming POP with stacked semiconductor die and bumps formed directly on the lower die
有权
半导体器件及其形成方法,其形成有直接在下模上形成的堆叠的半导体管芯和凸块
- Patent Title: Semiconductor device and method of forming POP with stacked semiconductor die and bumps formed directly on the lower die
- Patent Title (中): 半导体器件及其形成方法,其形成有直接在下模上形成的堆叠的半导体管芯和凸块
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Application No.: US13195636Application Date: 2011-08-01
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Publication No.: US09324659B2Publication Date: 2016-04-26
- Inventor: SungWon Cho , DaeSik Choi , HyungSang Park , DongSoo Moon
- Applicant: SungWon Cho , DaeSik Choi , HyungSang Park , DongSoo Moon
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/538 ; H01L23/498 ; H01L21/56 ; H01L23/00 ; H01L21/683 ; H01L25/03 ; H01L25/065 ; H01L25/00 ; H01L23/31

Abstract:
A semiconductor device has a first semiconductor wafer mounted to a carrier. A second semiconductor wafer is mounted to the first semiconductor wafer. The first and second semiconductor wafers are singulated to separate stacked first and second semiconductor die. A peripheral region between the stacked semiconductor die is expanded. A conductive layer is formed over the carrier between the stacked semiconductor die. Alternatively, a conductive via is formed partially through the carrier. A bond wire is formed between contact pads on the second semiconductor die and the conductive layer or conductive via. An encapsulant is deposited over the stacked semiconductor die, bond wire, and carrier. The carrier is removed to expose the conductive layer or conductive via and contact pads on the first semiconductor die. Bumps are formed directly on the conductive layer and contact pads on the first semiconductor die.
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