Invention Grant
- Patent Title: Metal pillar bump packaging strctures and fabrication methods thereof
- Patent Title (中): 金属柱凸起包装结构及其制造方法
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Application No.: US14660376Application Date: 2015-03-17
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Publication No.: US09324671B2Publication Date: 2016-04-26
- Inventor: Guowei Zhang
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201410114630 20140325
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L29/40 ; H01L23/00

Abstract:
A method for fabrication a metal pillar bump packaging structure is provided. The method includes providing a semiconductor substrate; and forming a metal interconnect structure and a dielectric layer exposing a portion of the metal interconnect structure on the semiconductor substrate. The method also includes forming a photoresist layer having an opening with an undercut with a bottom area greater than a top area at the bottom of the opening to expose the metal interconnect structure and a portion of the dielectric layer on the semiconductor substrate; and forming a metal pillar bump structure having a pillar body and an extension part with an enlarged bottom area in the opening and the undercut. Further, the method includes forming a soldering ball on the metal pillar bump structure.
Public/Granted literature
- US20150279795A1 METAL PILLAR BUMP PACKAGING STRCTURES AND FABRICATION METHODS THEREOF Public/Granted day:2015-10-01
Information query
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