Invention Grant
- Patent Title: Method of making an integrated switchable capacitive device
- Patent Title (中): 制造集成可开关电容器件的方法
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Application No.: US14957544Application Date: 2015-12-02
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Publication No.: US09324706B2Publication Date: 2016-04-26
- Inventor: Pascal Fornara , Christian Rivero
- Applicant: STMicroelectronics (Rousset) SAS
- Applicant Address: FR Rousset
- Assignee: STMicroelectronics (Rousset) SAS
- Current Assignee: STMicroelectronics (Rousset) SAS
- Current Assignee Address: FR Rousset
- Agency: Slater & Matsil, L.L.P.
- Priority: FR1353945 20130430
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/06 ; H01L23/482 ; H01L23/522 ; H01L21/768 ; H01L49/02 ; H01L23/64

Abstract:
A method is provided for forming an integrated circuit chip with a variable capacitor disposed in a metallization. A back end of line metallization is formed over the semiconductor substrate. The variable capacitor is formed within a cavity of the back end of line metallization. The variable capacitor includes a fixed main capacitor electrode disposed in a first metal layer of the back end of line metallization, a second main capacitor electrode electrically connected to a second metal layer of the back end of line metallization and vertically spaced from the fixed main capacitor electrode, and a movable capacitor electrode disposed in the first metal layer adjacent the fixed main capacitor electrode.
Public/Granted literature
- US20160093609A1 Method of Making an Integrated Switchable Capacitive Device Public/Granted day:2016-03-31
Information query
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