Invention Grant
- Patent Title: Thin film transistor substrate having metal oxide semiconductor and manufacturing the same
- Patent Title (中): 薄膜晶体管基板具有金属氧化物半导体并制造其
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Application No.: US14550483Application Date: 2014-11-21
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Publication No.: US09324736B2Publication Date: 2016-04-26
- Inventor: Sungkeun Lee , Yongtae Song , Imkuk Kang , Sungjun Yun , Woocheol Jeong
- Applicant: LG DISPLAY CO., LTD.
- Applicant Address: KR Seoul
- Assignee: LG DISPLAY CO., LTD.
- Current Assignee: LG DISPLAY CO., LTD.
- Current Assignee Address: KR Seoul
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: KR10-2013-0148531 20131202
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L29/45 ; H01L29/66 ; H01L29/417

Abstract:
The present disclosure relates to a thin film transistor substrate having a metal oxide semiconductor for flat panel displays and a method for manufacturing the same. The present disclosure suggests a thin film transistor substrate including: a gate electrode on a substrate; a gate insulating layer covering the gate electrode; a source electrode overlapping with one side of the gate electrode on the gate insulating layer; a drain electrode being apart from the source electrode and overlapping with other side of the gate electrode on the gate insulating layer; an oxide semiconductor layer contacting an upper surface of the source electrode and the drain electrode, and extending from the source electrode to the drain electrode; and an etch stopper having the same shape with the oxide semiconductor layer, and contacting an upper surface of the oxide semiconductor layer.
Public/Granted literature
- US20150155310A1 THIN FILM TRANSISTOR SUBSTRATE HAVING METAL OXIDE SEMICONDUCTOR AND MANUFACTURING THE SAME Public/Granted day:2015-06-04
Information query
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