Invention Grant
- Patent Title: Image sensor, production method therefor, and inspection apparatus
- Patent Title (中): 图像传感器及其制作方法及检查装置
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Application No.: US14127221Application Date: 2012-08-01
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Publication No.: US09324751B2Publication Date: 2016-04-26
- Inventor: Ayumu Taguchi
- Applicant: Ayumu Taguchi
- Applicant Address: JP Tokyo
- Assignee: SONY CORPORATION
- Current Assignee: SONY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2011-182131 20110824
- International Application: PCT/JP2012/004883 WO 20120801
- International Announcement: WO2013/027338 WO 20130228
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/359 ; H01L27/14 ; G01N21/64

Abstract:
[Object]To provide an image sensor having high light collection efficiency and less crosstalk among pixels, a production method therefor, and an inspection apparatus.[Solving means]In an image sensor including a light source conversion unit that includes a plurality of light-receiving devices and converts incident light into an electric signal, a plurality of lenses that are provided in an immediately-above area of the light-receiving devices and collect light toward a light-receiving unit of the light-receiving devices positioned right below the lenses, and an insulation layer that is formed of an optically-transparent material and formed above the lenses, detection areas are provided on a surface of the insulation layer while being apart from one another for each of the light-receiving devices, a center of each of the detection areas being positioned on an extended line connecting a center of the light-receiving unit of each of the light-receiving devices and a center of the lens provided right above each of the light-receiving devices. In addition, a sample as a detection target is fixed to at least the detection areas.
Public/Granted literature
- US20140118590A1 IMAGE SENSOR, PRODUCTION METHOD THEREFOR, AND INSPECTION APPARATUS Public/Granted day:2014-05-01
Information query
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