Invention Grant
US09324761B2 Method of making image sensor devices having a concave reflective shield
有权
制造具有凹面反射屏蔽的图像传感器装置的方法
- Patent Title: Method of making image sensor devices having a concave reflective shield
- Patent Title (中): 制造具有凹面反射屏蔽的图像传感器装置的方法
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Application No.: US14602863Application Date: 2015-01-22
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Publication No.: US09324761B2Publication Date: 2016-04-26
- Inventor: Yu-Hao Shih , Szu-Ying Chen , Hsing-Lung Chen , Jen-Cheng Liu , Dun-Nian Yaung , Volume Chien
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW
- Agency: Hauptman Ham, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/0232 ; H01L31/18
Abstract:
A method of forming an image sensor device where the method includes forming a first dielectric layer on a substrate. The method further includes patterning the first dielectric layer to define an area for a reflective shield, where the area defined for the reflective shield is above a photodiode. Additionally, the method includes forming the reflective shield on the substrate by filling the defined area with a high reflectivity material, and the high reflective material comprises a polymer.
Public/Granted literature
- US20150132884A1 METHOD OF MAKING IMAGE SENSOR DEVICES Public/Granted day:2015-05-14
Information query
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